MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering
Tai-Ran Hsu
MEMSfabricationengineering
Contribution to CWM
Reference for MEMS fabrication processes, quality factor analysis in micro-resonators, and packaging techniques. Directly informed the CWM MEMS device specification and fabrication pathway.
Citation
Hsu, T.-R. (2008). MEMS and Microsystems, 2nd ed. Wiley.